The Olympus Semiconductor/FPD Inspection Microscope MX63 and MX63L are optimized for high-quality inspection of wafers up to 300 millimeters, flat panel displays, circuit boards, and other large sample chips. Their modular design allows you to choose the components that need to be customized into your application. By combining Olympus semiconductor/FPD inspection microscopy with Olympus flow image analysis software, your entire workflow, from observation to report creation, can be simplified.

Frontier analysis tools

The multifunctional observation capability of the MX63 series provides clear and distinct images, allowing users to reliably detect defects in samples. The new lighting technology and image acquisition options in Olympus Flow Image Analysis software provide users with more choices to evaluate their samples and record their findings.

Invisible becomes visible: a mixture of observation and acquisition

Hybrid observation techniques combine dark fields with another observation method, such as bright fields, fluorescence, or polarization, to produce unique observation images. Mixed observation enables users to view defects that are difficult to see with conventional microscopes. The circular LED illumination used for dark field observation has a directional dark field function, where only one quadrant is illuminated at a given time. This reduces the halo of the sample and helps visualize the surface texture of the sample.

The structure of semiconductor chips

Residual photoresist on semiconductor chips

Easy creation of panoramic images: instant MIa

By using Multiple Image Alignment (MIA), users can quickly and easily stitch images by simply moving the KY knob during the manual phase, while an electric platform is unnecessary. Olympus streaming software uses pattern recognition to generate panoramic images, giving users a broader perspective.

Create all focus images: EFI

The Extended Focused Imaging (EFI) feature in Olympus Stream captures images of the sample, which extend beyond the depth of focus of the target and are overlaid together to create a fully focused image. EFI can be manually or electrically executed along the Z-axis and create a height map for structural visualization. EFI images can also be built offline in the streaming desktop.

Capture bright and dark areas with HDR

Using advanced image processing, high dynamic range (HDR) adjusts the brightness differences in the image to reduce glare. HDR improves the visual quality of digital images, thereby helping to generate professional reports.

From basic measurement to analysis

Measurement is crucial for quality and process control and inspection. Considering this, even the entry-level Olympus streaming software package includes a complete interactive measurement function menu, and all measurement results are saved in image files for further documentation. In addition, Olympus Flow Material Solutions provide an intuitive, workflow oriented interface for complex image analysis. By clicking a button, image analysis tasks can be executed quickly and accurately. With a significant reduction in the processing time of repetitive tasks, operators can focus on their inspections at hand.

Report Generation

Creating a report usually takes longer than capturing images and measuring. Olympus streaming software provides intuitive report creation to repeatedly generate intelligent and complex reports based on pre-defined templates. Editing is simple, the report can be exported to Microsoft Word or PowerPoint software. In addition, the reporting function of Olympus streaming software enables the acquisition of digitally scaled and enlarged images. The report file is of a reasonable size to facilitate data exchange via email.

Independent camera options

Using DP22 or DP27 microscope cameras, the MX63 series becomes an advanced independent system. The camera can be controlled through a compact box that requires only a small amount of space, helping users maximize the use of laboratory space while also capturing clear images and conducting basic measurements.

Support the design of Cleanroom Conformity

The design of the MX63 series works in clean rooms and helps reduce the risk of contamination or damage to samples. The system has an ergonomic design that helps users feel comfortable even during long-term use. The MX63 series complies with international specifications and standards, including semi S2/S8, CE, and UL.

Optional chip loader integration - AL120 system*

The optional chip loader can be connected to the MX63 series to transfer silicon and compound semiconductor chips from cassette tapes to the microscope stage without using tweezers or sticks. Excellent performance and reliability enable effective macroscopic inspection of both the front and back, while loaders help improve productivity in the laboratory.

MX63 combined with Al120 chip loader (200mm version) * E120 is not available in EMEA.

Quick cleaning inspection

The MX63 series meets the requirements of cleanroom chip inspection. All mobile components are equipped with shielding structures and anti-static treatment is applied to microscope frames, tubes, respiratory masks, and other components. The rotation speed of the motorized nasal wing is faster than that of the manual nasal wing, reducing inspection time while keeping the operator's hand below the chip to minimize potential contamination.

System design for achieving effective observation

Due to the combination of built-in clutch and XY knob, the XY stage can perform both coarse and fine movements simultaneously. This stage contributes to observation efficiency, even for large samples such as 300mm chips.The wide range of the tilted observation tube allows the operator to sit comfortably under the microscope.

Accept all chip sizes

This system is compatible with various types of 150-200mm and 200-300mm wafer holders and glass plates. If the size of the chip changes on the production line, the frame of the microscope can be modified at a lower cost. With the MX63 series, different stages can be used to accommodate inspection lines on 75mm, 100mm, 125mm, and 150mm chips.

Intuitive microscope control: comfortable and easy to use

The setup operation of the microscope is simple, making it easy for users to adjust and reproduce the system settings.

Quickly Find Focus: Focus Assistance

Inserting focusing auxiliary devices in the optical path can easily and accurately focus on low contrast samples, such as bare chips.

Easily restore microscope settings: encoding hardware

The encoding function combines the hardware settings of the MX63 series with Olympus streaming image analysis software. The observation method, illumination intensity, and magnification are automatically recorded and stored in the relevant images by the software. Due to the easy reproducibility of the settings, any operator can undergo the same quality checks and receive minimal training.

Ergonomic control for faster and more comfortable operation

The control device for changing the target and adjusting the aperture is located under the microscope, so users do not need to release the focusing knob or move their head away from the eyepiece during use.

Faster observation through light intensity manager and automatic aperture control

Under a normal microscope, each observer needs to adjust the light intensity and aperture. The MX63 series enables users to set light intensity and aperture conditions for different magnifications and observation methods. These settings can be easily recalled, helping users save time and maintain excellent image quality.

Light intensity manager

Conventional light intensity	When changing the magnification or observation method, the image becomes too bright or dim.
Light intensity manager	Automatically adjust the light intensity to produce excellent images when changing the magnification or observation value.

Automatic aperture control

Optical and digital imaging quality inspection

Olympus' history of developing high-quality optics and advanced digital imaging capabilities has proven to provide excellent measurement accuracy in optical quality and microscope records.

Outstanding optical performance: wavefront aberration control

The optical performance of the objective lens directly affects the quality of the observed image and the analysis results. Olympus UIS2 high magnification target design aims to minimize wavefront aberration and provide reliable optical performance.

Bad wavefront, good wavefront (UIS2 target)

Consistent color temperature: high-intensity white LED lighting

The MX63 series uses high-intensity white LED light sources for reflective and transmissive lighting. LEDs maintain consistent color temperature regardless of intensity to ensure reliable image quality and color reproduction. LED systems provide efficient and long-lasting lighting materials suitable for material science applications.

Accurate measurement: automatic calibration

Similar to digital microscopes, automatic calibration is available when using Olympus Flow software. Automatic calibration helps eliminate human variability during the calibration process, resulting in more reliable measurements. Automatic calibration is an algorithm that automatically calculates the correct calibration from the average of multiple measurement points. This greatly reduces the differences introduced by different operators and maintains consistent accuracy, improving the reliability of regular verification.

Completely clear image: image shadow correction

The feature of Olympus streaming software is shadow correction to adapt to shadows on image corners. When used in conjunction with intensity threshold settings, shadow correction provides more accurate analysis.

Semiconductor chip (binary image)

Completely customizable

The purpose of the MX63 series is to enable customers to choose various optical components to meet individual inspection and application needs. This system can utilize all observation methods. Users can also choose from various Olympus streaming image analysis software packages to meet their personal image acquisition and analysis needs.

Two systems adapt to different sample sizes

The MX63 system can accommodate chips up to 200 millimeters, while the MX63L system can handle chips up to 300 millimeters with the same small footprint as the MX63 system. Modular design allows you to customize microscopes according to your specific requirements.

Infrared compatibility

Infrared objective lenses can be used for non-destructive testing of the interior of IC chips packaged and installed on PCBs, utilizing the characteristics of silicon that transmits infrared light. 5X to 100X infrared targets can be color corrected through near-infrared visible light wavelengths.

The MX63 series is used in the application field of reflective light microscopes. These applications are an example of some methods used by the system for industrial inspection.

Infrared (IR) is used to search for other defects in IC chips and silicon devices on glass.

Polarized light is used to reveal the texture of matter and the state of crystals. It is suitable for inspecting wafer and LCD structures.

Differential Interference Contrast (DIC) is used to assist in distinguishing between views and small sample sizes. It is an ideal university inspection sample with high differences such as minute magnetic heads, hard disk media, and polished chips.

Dark field is used to detect small scratches or defects on samples, or to inspect samples with mirrors (such as chips). Mixed lighting allows users to view modes and colors.

Fluorescence is used in samples that emit light when illuminated with specially designed filters. This is used to detect pollution and residual photoresist. Mixed lighting can observe photoresist residues and IC patterns.

This observation technique is suitable for transparent samples such as LCD, plastic, and glass materials. Mixed lighting enables observation of filter colors and circuit patterns.

Olympus Semiconductor/FPD Inspection Microscope Solution MX63/MX63L Configuration Parameters

		MX63	MX63L
Optical system		UIS2 optical system (infinite correction)
apparent minute Mirror machine Frame up	Reflected light illumination	LED lamp, 12V100W halogen lamp, 100W mercury lamp Lighting methods: bright field, dark field Built in electric aperture stop Observation methods: bright field, dark field, differential interference (DIC), simple polarization, fluorescence, infrared
	Transmitted light illumination	Transmitting light illumination device: MX-TILLA or MX-TILLB -MX-TILLA: Aperture stop NA0.5 -MX-TILLB: Aperture stop NA0.6 Light source: LG-PS2 (halogen lamp 12/V100 W) Observation method: bright field, simple polarization
	Focusing	Travel distance: 32 mm Fine tuning stroke per revolution: 100 μ m Zui small scale: 1 μ m Equipped with an upper limit limiter for torque adjustment of the coarse adjustment handle
	Load limit (including platform)	8 kg	15 kg
observe observe Tube	Wide field of view (FN 22 mm)	Just like three eyes: U-ETR4 Vertical and oblique three eyes: U-TTR-2 Inverted three eyes: U-TR30-2, U-TR30IR (infrared observation) Inverted binocular: U-BI30-2 Inverted and tilted binocular: U-TBI30
	Ultra wide field of view （FN 26.5 mm）	Positive image, tilted three eyes: MX-SWETTR spectral ratio of 100%: 0 or 0: 100%) Positive image, tilted three eyes: U-SWETTR spectral ratio 100%: 0 or 20%: 80%) Inverted Three Eyes: U-SWTR-3
Objective lens converter		Mingchang six hole electric converter with DIC slot: U-D6REMC Mingchang five hole converter with DIC automatic centering slot: U-P5REMC Bright and dark field six hole electric converter with DIC slot: U-D6BDREMC Light dark field five hole converter with DIC slot: U-D5BDREMC Light dark field five hole converter with DIC automatic centering slot: U-P5BDREMC
Carrier platform		Built in clutch drive, coaxial right handle: MX-SIC8R Journey: 210 x 210 mm Transparent area: 189 x 189 mm Built in clutch drive, coaxial right handle: MX-SIC6R2 Travel: 158 x 158 mm (for reflected light)	Built in clutch drive, coaxial right handle: MX-SIC1412R2 Journey: 356 x 305 mm Transparent area: 356 x 284 mm
Weight		Approximately: 35.6kg (microscope frame 26kg)	Approximately: 44kg (microscope frame 28.5kg)

Note: The content of the parameter table is an introduction to the main parameters, actualaccording toConfigure the requirements.